Abstract
Damage-less mechanical polishing technique for advanced crystal substrates using a resin pad and electric field-assisted polishing
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of the Japan Society for Abrasive Technology
Paper Title
Journal
Date
