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Abstract
The steady-state trapping model for inert-gas diffusion in alkali halides is used to obtain direct experimental information on the damage depth distribution resulting from 15-keV Kr bombardment of RbCl. The average damage concentration falls to 5% at about 350 Å (in rough agreement with random stopping theory) but does not reach 1% until about 650 Å (suggesting that channeled stopping also plays a role). Beyond 1200 Å the implanted damage merges with the background concentration of traps. The traps are shown to be single vacancies by comparing diffusion and conductivity measurements for pure and doped specimens.
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