Abstract

One of the crucial aspects of research in nano technology is precision control and manipulation of devices at the nano scale i.e nanopositioning. Amongst the most commonly employed nano-level actuators, the piezo ones are the most popular, however, they exhibit a strong hysteresis effect. This paper gives a hysteresis compensation technique for a Nano positioning system in the hardware paradigm using TM320C6713 DSP Starter Kit (DSK). The scheme employs an inverse Dahl model-based feedforward control to produce precise voltage for a plant to obtain desired trajectory. First the dynamic model of the micro-nano manipulator with Dahl hysteresis is established. Consequently the feedforward control is programmed in Code Composer Studio and then the control signal for the piezo actuators is generated form DSK Board. The key advantage of using DSK in this research is to obtain faster processing speed, floating point operations and flexible programming.

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