Abstract
This paper describes micro solid oxide fuel cell (SOFC) using Gd-doped CeO_2 (GDC) solid oxide electrolyte. A GDC membrane is made extremely thin (〜300 nm thick) for low temperature operation, and a microheater is formed on the GDC membrane for local heating. To fabricate the self-supported GDC membrane, the stress of GDC films deposited by pulse laser deposition (PLD) was reduced by controlling partial O_2 pressure during deposition. The etch resistance of the GDC film against several chemicals was investigated to design the fabrication process of the micro SOFC. Using the designed fabrication process, the core structure of the micro SOFC was successfully fabricated.
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