Abstract
We have studied cylindrical hollow cathode magnetron sputtering configuration with the aim of eliminating negative ion back-sputtering and realizing stoichiometric YBaCuO thin films from stoichiometric YBaCuO hollow cylindrical target. Results obtained indicate that under optimized sputtering conditions, YBaCuO films with excellent compositional uniformity within 1% of that of the target can be realized over an area almost 90% of the area covered by the inner diameter of the cylindrical target. Films deposited on unheated 〈100〉 MgO substrates and post annealed at 920°C in oxygen have shown a superconducting onset at 84 K and a zero resistance transition at 80 K.
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