Abstract
The poor evaluation of the cyclic deformation response has been a main challenge for extensive applications and developments of ITO/Ag/ITO (IAI) multilayer films. In this paper, the effects of tri-layer film structure on hysteresis behavior and cyclic deformation response were investigated for IAI multilayer films via nanoindentation. The results indicate that the decreased density of picture-frame cracks and the enhanced mechanical performances for 300°C-IAI multilayer films are compared with those of ITO single-layer films under cyclic nanoindentation. Additionally, according to the energy-based method, the values of fracture toughness for 300°C-IAI multilayer films and ITO single-layer films are 3.49–4.17 MPa m0.5 and 3.04–3.18 MPa m0.5, respectively. Consequently, the structural design of ceramic/metal/ceramic tri-layer films are expected to be a potential method to enhance the resistance of cyclic deformation damage for transparent conducting films.
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