Abstract
プラズマCVD法におけるDCバイアスと基板テーブル面積のSiH結合量への影響
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https://doi.org/10.1541/ieejfms1990.114.10_718
Publication Date: Jan 1, 1994 | |
Citations: 1 | License type: free |
プラズマCVD法におけるDCバイアスと基板テーブル面積のSiH結合量への影響
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