Abstract
Curriculum development in microelectromechanical systems (MEMS) in the Mechanical Engineering and Applied Mechanics (MEAM) Department at the University of Michigan is presented. A course curriculum structure that integrates both mechanical and electrical engineering courses is proposed for mechanical engineering students. The proposed curriculum starts from undergraduate study and finishes at the Ph.D. level. Two new graduate-level MEMS courses are proposed: "Introduction to MEMS" for senior undergraduate students and entry-level graduate students and "Advanced MEMS" for graduate students. The first course has been experimentally taught at the University of Michigan for three years and the class assessments are summarized and analyzed in this paper. It is clear from the student responses that they are interested in taking courses in emerging technologies such as MEMS and more courses in the MEMS area should be offered. Future MEMS curriculum development and a new MEMS course for undergraduate-level students in the college of engineering are discussed.
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