Abstract
ABSTRACTInAlGaN quaternary material is very attractive for realizing ultraviolet (UV) emitting devices working at 300 – 350 nm wavelength range. We demonstrate current injection into 340 nm-band InAlGaN based UV light emitting diodes (LEDs), for the first time, fabricated by metal organic vapor phase epitaxy (MOVPE). We performed current injection into AlGaN/AlGaN multi quantum well (MQW), bulk InAlGaN quaternary and InAlGaN/InAlGaN MQW LEDs through Mg-doped AlGaN/GaN superlattice hole conductive layers. The injected current density was ranging 0 – 0.5 kA/cm2 under pulsed or CW operation. The intensity of both photoluminescence (PL) and electroluminescence for InAlGaN quaternary-based LED was much higher than that for AlGaN based LEDs at room temperature. From these results InAlGaN quaternary-based QWs are expected to realize high intensity UV LEDs and LDs.
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