Abstract
The ripple normal force of permanent magnet linear synchronous motor (PMLSM) can directly deteriorate the machining accuracy of ultra-precision CNC machine tool which use linear motor direct drive. First, the normal force of PMLSM was calculated using finite element method (FEM) .then, id current compensate lookup table was established by indexing iq current, gap and position of mover .In order to reduce the ripple of normal force and keep the thrust steady, PMLSM current compensation control system was realized by injecting the id current to counteract the normal force ripples using field oriented control (FOC) method. The effectiveness of this proposed method is verified by the simulation using Matlab according to the comparison between the compensation and no compensation cases.
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