Abstract
The electron density ne of stationary plasma can be easily obtained on the basis of the resonance frequency f of a curling probe (CP) measured by a network analyzer (NWA). However, in pulsed plasma with discharge period T, the ne and f values periodically change with time. This study extends the conventional CP technique to a time-resolved measurement of the pulse-modulated electron density. The condition necessary for the measurement is revealed to be synchronization of NWA with the pulse modulation, which is expressed as (n − 1)T/TSWP = integer (1, 2, …) for a number n of data point and sweep time TSWP.
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