Abstract
Recently, due to increase in the usage of toxic gas and inflammability gas, the ability to monitor and precisely measurement of these gases is crucial in preventing the occurrence of various accidents. CuO doped and undoped WO3 thick films gas sensors were prepared using screen-printing method on alumina substrates. A structural properties of WO₃:CuO thick films had monoclinic phase and triclinic phase of WO₃ together. Sensitivity of WO₃:CuO sensor at 2000 ppm of CO₂ gas and 50 ppm of H2S gas was investigated. 4 wt% Cu doped WO₃ thick films had the highest sensitivity of CO₂ gas and H₂S gas.
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