Abstract
Well-defined cubic AlN ultrathin layers formed by nitridation of Al2O3 (0001) substrate at various temperatures were observed by high-resolution transmission electron microscopy. The polarity of the AlN layers strongly depends on the substrate pretreatment and nitridation temperature. The structure of the AlN layers plays a key role in polarity selection of subsequent ZnO films, and both Zn-polar and O-polar ZnO films could be steadily obtained by control of the cubic AlN layers.
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