Cu3Ge ohmic contacts to n-type GaAs

Abstract

We show that Cu-Ge alloys prepared by depositing sequentially Cu and Ge layers onto GaAs substrates at room temperature followed by annealing at 400°C form a low-resistance ohmic contact to n-type GaAs over a wide range of Ge concentration that extends from 20 to 40 at.%. A contact resistivity of (4-6) x 10-7 Ω cm2 is obtained on n-type GaAs with doping concentrations of∼ 1 x 1017 cm-3. The contact resistivity is affected only slightly by varying the Ge concentration in the range studied and is not influenced by the deposition sequence of the Cu and Ge layers. In addition, the contacts are electrically stable during annealing at 450°C after contact formation. Structure and properties of Cu-Ge contact layers having lower and higher Ge concentrations from the stoichiometric Cu3Ge composition are compared. High-resolution transmission electron microscopy and x-ray diffractometry have been used to study the ordering in the e1-Cu3Ge (average lattice parameters: a0= 5.30A, b0= 4.20A, c0= 4.56A) which is responsible for orthorhombic distortion of the parent hexagonal ζ-phase. The results suggest that the formation of theξ and e-Cu3Ge phases creates a highly doped n+-GaAs surface layer which leads to the low contact resistivity.