Abstract

Self-controlled active oscillating microcantilevers with a piezoresistive readout are very promising sensitive sensors, despite their small surface. In order to increase this surface and consequently their sensitivity, we nanostructured them with copper hydroxide (Cu(OH)2) or with copper oxide (CuO) nanorods. The Cu(OH)2 rods were grown, on a homogeneous copper layer previously evaporated on the top of the cantilever. The CuO nanorods were further obtained by the annealing of the copper hydroxide nanostructures. Then, these copper based nanorods were used to detect several molecules vapors. The results showed no chemical affinity (no formation of a chemical bond) between the CuO cantilevers and the tested molecules. The cantilever with Cu(OH)2 nanorods is selective to nitrogen dioxide (NO2) in presence of humidity. Indeed, among all the tested analytes, copper hydroxide has only an affinity with NO2. Despite the absence of affinity, the cantilevers could even so condensate explosives (1,3,5-trinitro-1,3,5-triazinane (RDX) and pentaerythritol tetranitrate (PETN) on their surface when the cantilever temperature was lower than the explosives source, allowing their detection. We proved that in condensation conditions, the cantilever surface material has no importance and that the nanostructuration is useless because a raw silicon cantilever detects as well as the nanostructured ones.

Highlights

  • Microcantilevers used for the development of highly sensitive sensor probes have been massively studied in the literature for the last 20 years

  • The measurements were performed in condensation condition i.e., for a temperature of the pentaerythritol tetranitrate (PETN) source (85 ◦ C) higher than the cantilever temperature (65 ◦ C)

  • The surface of piezoresitive cantilevers was nanostructured with copper hydroxide and copper oxide nanorods and tested for their affinity with respect to different VOCs and explosive vapors

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Summary

Introduction

Microcantilevers used for the development of highly sensitive sensor probes have been massively studied in the literature for the last 20 years. Such cantilevers are identical to the atomic force microscopy cantilevers and are sensitive to temperature [1] and humidity [2] variations. The sensitivity of these micromechanical devices is limited by their small surface area. To overcome this problem, the cantilever surface can be nanostructured with TiO2 nanotubes [10], Sensors 2018, 18, 1108; doi:10.3390/s18041108 www.mdpi.com/journal/sensors

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