CTR Scattering Derived from Dynamical Theory of Diffraction

Abstract

“X-ray Crystal Truncation Rods Scattering” is interpreted by the diffraction far from the Bragg peaks obtained from the dynamical theory of diffraction. In the Ewald construction that is used in the kinematical theory, the intensity of the Bragg reflection obtained from the dynamical theory is distributed in a rod shape that is elongated through each Bragg point in the direction perpendicular to the crystal surface. The intensities, therefore, are represented as a function of the distance between the observation point in reciprocal space and the Bragg point. We calculate the intensity around the 111 reciprocal lattice point of Si(001) for the various diffraction geometries – the symmetric diffraction geometry, the constant incident geometry, and the constant exit angle geometry.