C/Si 몰 비가 TEOS와 페놀수지를 출발원료 사용하여 합성된 β-SiC 분말의 특성에 미치는 영향

Abstract

β-SiC powders were synthesized by a carbothermal reduction process using SiO₂-C precursors fabricated by a sol-gel process using phenol resin and TEOS as starting materials for carbon and Si sources, respectively. The C/Si molar ratio was selected as an important parameter for synthesizing SiC powders using a sol-gel process, and the effects of the C/Si molar ratio (1.4-3.0) on the particle size, particle size distribution, and yield of the synthesized β-SiC powders were investigated. It was found that (1) the particle size of the synthesized β-SiC powders decreased with an increase in the C/Si molar ratio in the SiO₂-C hybrid precursors, (2) the particle size distribution widened with an increase in the C/Si molar ratio, and (3) the yield of the β-SiC powder production increased with an increase in the C/Si molar ratio.