Abstract
Changes in the SIMS spectra of poly(vinyl chloride) (PVC) and poly(methyl methacrylate) (PMMA) as a function of 8 keV Cs+dose have been studied in the range 1011–5×1013ions cm-2. In order to resolve uncertainties in previous studies (based on quadrupole SIMS and insulating samples) this work has utilized a high mass resolution ToF-SIMS instrument and films on silicon sufficiently thin to obviate the need for surface potential control (charge neutralization). The form of the damage curves has been compared with a recently introduced model of damage development based on the statistics of bond breaking. © 1997 by John Wiley & Sons, Ltd.
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