Abstract
Large areas (up to 15 cm 2) Cd x Hg 1- x Te epitaxial layers with Cd composition ( x value) from 0.14 to 0.4 (thickness < 15 μm) have been sputtered on to CdTe substrates with [111] orientations. The layers are grown on substrates heated up to 200°C with a deposition rate of 0.6 μm/h. Crystallographic characterization has been carried out, using different techniques such as: reflection high energy electron diffraction (RHEED), reflection X-ray topography and transmission electron microscopy (TEM). RHEED patterns reveal a good crystallographic quality. X-ray topographies show that the substructure of the layer is very similar to that of the substrate. These results are confirmed by TEM observations.
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