Abstract
Results of a detailed structural characterization of In 2O 3 films, deposited by spray pyrolysis from InCl 3–water solutions, are presented in this paper. The influence of technological parameters such as precursor concentration in sprayed solution, pyrolysis temperature, and film thickness on morphology, crystallite sizes, texturing, and strains were analyzed. SEM, TEM, XRD, AFM, HRTEM, and laser ellipsometry methods were applied for these purposes. An explanation of observed regularities is also given.
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