Abstract
Electron backscattering diffraction (EBSD) is commonly used on bulk samples for crystallographic material characterization. In this work, the technique was applied on transmission electron microscopy (TEM)-type thin specimens, prepared with a focused ion beam. Orientation maps were successfully collected on specimens made of a Cu3Au copper-gold alloy. As compared to EBSD analysis on a bulk specimen, an improved pattern quality and a high spatial resolution (well below 10 nm) were obtained. Furthermore, a clear improvement of the signal-to-noise ratio with decreasing sample thickness was observed.
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