Abstract
In a number of studies, the formation of perovskite CaTiO 3 (CTO) phase was observed at the interface layer when depositing hydroxyapatite coatings onto biomedical titanium alloys. Recently, CTO itself has been proposed as a suitable candidate for biocompatible coatings for medical implants, particularly Ti implants. We report on polycrystalline CaTiO 3 coatings prepared on silicon and titanium using a sol–gel technique followed by rapid thermal processing (RTP). The structure, composition, and surface morphology of CTO coatings RTP crystallized in the range of 500–800 °C for 30–180 s were investigated by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and non-contact optical profilometry. Crystallization of single-phase CTO coatings on titanium is observed starting at 500 °C, while on Si, the coating remains amorphous at 550 °C, and an intermediate CaCO 3 phase is observed at up to 650 °C.
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