Abstract
The crystallization behavior of Fe78Si13B9 amorphous alloys induced by Ar ion bombardment was investigated by X-ray diffraction (XRD) and transmission electron microscopy (TEM) analysis. The crystallization process of amorphous alloys can be controlled by adjustment of ion incident angles (θ), beam density and substrate temperature. The compressive stress caused by ion bombardment will result in the decrease of critical nucleation energy and induce the crystallization of amorphous alloy even at very low temperature, and the thermal effect converted from energetic ions will improve the crystallization of amorphous alloys. The crystallization process of amorphous alloy induced by ion bombardment was a stress induced phase transformation process assisted by thermal effect.
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