Abstract
The pyrochlore to perovskite phase transformation was studied in lead zirconate titanate (PZT) thin films. The films were fabricated on platinum electrodes and annealed by rapid thermal processing (RTP). The phases which formed and their location in the film were analyzed using glancing angle XRD and depth profiling was demonstrated. Grain size and structure, nucleation sites and surface morphology were determined with transmission electron microscop (TEM) and atomic force microscopy (AFM). The role of AFM in this type of transformation study was assessed.The PZT films crystallized with a (100) orientation which was preferentially nucleated at the platinum/film interface. RTP at 650°C for 15 s was sufficient to complete the transformation. However, columnar grain growth and improvements in the ferroelectric properties were obtained with increased RTP time. A PZT film with RTP at 650°C for 1 min possessed a remanent polarization of 25 μC/cm2 and a dielectric constant of ϵ = 650.
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