Abstract
An optical transmission technique has been used to measure the propagation velocity of the crystallization front during scanned laser crystallization of amorphous Ge films on fused-silica substrates. The measurements confirm our theoretical model for the solid-phase amorphous-to-crystalline transformation. According to this model, the periodic structural features of the crystallized films are formed because the crystallization front moves in a series of periodic jumps between rest positions, with the velocity of the front during each jump much higher than the laser scanning velocity. The measured values of the crystallization-front velocity range from 140 to 260 cm/sec, compared with the laser scanning velocity of only 0.5 cm/sec.
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