Crystallization features and physical properties of the thin-film heterostructure of lead zirconate titanate – lead oxide

Abstract

Various diagnostic techniques aimed at studying the structure and physical properties (synchronous thermal analysis, atomic force microscopy operating in the current measurement mode, electron-probe X-ray spectral microanalysis, dynamic method for determining the pyroelectric response) were used to study the crystallization features and physical properties of the thin-film heterostructure PZT – PbO1+x formed by a two-stage technique of RF magnetron sputtering of a ceramic target. During the first stage, amorphous films were deposited on a “cold” platinized silicon substrate, while the second stage involved high-temperature annealing in air. It was shown that annealing of amorphous films and crystallization of the intermediate pyrochlore phase are accompanied by additional oxidation of the structure resulting in the formation of lead orthoplumbate and lead dioxide and additional oxidation of organic inclusions. The presence of a liquid phase of lead oxide contributes to the formation of the pyrochlore phase. It was found that lead oxide layers have significantly higher through conductivity than perovskite blocks. It was assumed that the increased conductivity of lead oxide layers is associated with lead dioxide, which has high conductive properties. Self-polarized thin films were detected to have an abnormal electrical response to the strobing thermal exposure, including the typical pyroelectric response, local photoconductivity shunted by layers of the perovskite phase, and through photoconductivity. The presence of photoconductivity is also associated with the conductive properties of lead dioxide