Abstract
The phase formation and film shrinkage during the crystallization process of YBa2Cu3O7−δ (YBCO) film prepared by the trifluoroacetate organic deposition (TFA-MOD) were investigated through a series of quenching experiments. X-ray diffraction patterns show that the YBCO grains initially form following the formation of the Ba-O-F phase at the heating ramp between 720 °C and 770 °C in the case of a high heating rate of 20 °C/min. It is identified that the crystallization process is involved three stages, i.e., the first one characterized by the formation of the Ba-O-F phase, the second one by the YBCO grain nucleation together with the significant shrinkage of films, and the last one by continuous YBCO grain growth. Moreover, a heterogeneous Cl element is believed to arise from the flowing water vapor, and it may move into the intermediate pyrolyzed film. It is observed that the densification process existing in the secondary stage can be destroyed by the exterior Cl element, leading to a more porous structure in contrast to their surrounding.
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