Abstract
The crystalline phases formed in tungsten oxide (WO3 − x) films upon isothermal step annealing in vacuum and air at various temperatures within 500–750°C have been studied. The films were deposited onto silica glass substrates by reactive dc magnetron sputtering. It is established that the observed thermochromism is related to the presence of an oxygen-deficient WO3 − x phase belonging to the hexagonal system, which is intensely formed as the annealing temperature increases from 650 to 750°C.
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