Abstract

The phase transition properties of MgSb/Sb multilayer thin films were studied systematically. After composited with MgSb layer, MgSb/Sb thin film had better amorphous stability and higher resistance. One-dimensional growth dominated mechanism made MgSb/Sb have ultra-fast phase change speed. The grain growth and interface stress resulted in a little change on surface morphology during crystallization. The multilayer structure was confirmed by element distribution on cross section. The reversible resistance switching was achieved on [MgSb(7 nm)/Sb(3 nm)]5-based device. This work showed that MgSb/Sb multilayer film was a potential material with fast speed and low power consumption for phase change memory application.

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