Crystallite size determination in μc-Ge films by x-ray diffraction and Raman line profile analysis

Abstract

Experimental Raman spectra were used to evaluate the average crystallite size of μc-Ge films. The experimental curves were fitted with a theoretical expression obtained by Richter et al. assuming a Gaussian size distribution. X-ray Diffraction line profile analysis was performed to obtain crystallite size and shape information. Comparison of the results from both techniques proves that the crystallite dimensions obtained can only be expected to be similar in those cases in which the approximation of “spherical” grains is valid.