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Abstract
Zirconium oxide (ZrO2) thin film was deposited on nitrogen-doped carbon nanotubes (NCNTs) by atomic layer deposition (ALD) using tetrakis(dimethylamido)zirconium(IV) and water as precursors. The observation using scanning electron microscope and transmission electron microscope (TEM) revealed that the tubular films of 100-cycle ZrO2 were very uniform and conformal on NCNTs. Further characterization using X-ray diffraction, Raman spectroscopy, selected area electron diffraction, and high-resolution TEM disclosed that the crystallinity of the deposited ZrO2 films was controllable with deposition temperatures in the range of 100–250 °C. In contrast to the pure amorphous ZrO2 film deposited at 100 °C, tetragonal crystalline ZrO2 film was prepared at 250 °C, while a mixture of the former two phases was found between 150 and 200 °C. In all cases, the growth of ZrO2 tubular films on NCNTs showed a transformation from an island-growth mode to a layer-by-layer growth mode with increasing ALD cycles. The ZrO2–NCNT ...
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