Abstract
Columnar (001) FePt-ZrO2-C films with large coercivity, small grain size, and high aspect ratio were obtained. By doping ZrO2 into FePt film at high sputtering temperature, tetragonal (002) textured ZrO2 was formed and distributed at the grain boundaries of FePt grains, resulting in the formation of columnar structured FePt films. The perpendicular anisotropy of FePt films was degraded since some (200) FePt grains were formed directly on the (002) textured ZrO2. With a small amount of carbon doping into FePt-ZrO2 35 vol. % films, the perpendicular anisotropy was improved. However, FePt grains were still interconnected. Upon further increasing concentration of ZrO2, (001) textured FePt-ZrO2 40 vol. %-C 5 vol. % films with well isolated grains in average diameter of 5.5 nm and very good columnar structure were obtained.
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