Abstract

In this paper we report on the growth of crystalline, europium- and neodymium-doped cubic yttria ((Eu, Nd):Y2O3) thin films on hexagonal corundum (α-Al2O3) substrates using the pulsed laser deposition (PLD) technique. A KrF excimer laser was used to ablate material from ceramic (Eu, Nd):Y2O3 targets. The yttria films were deposited on the α-Al2O3 (0001) substrates. X-ray diffractometry (XRD) revealed that the films grew in the Y2O3 [111]-direction. The surface topography of the films was investigated using atomic force microscopy (AFM).

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