Abstract
Fe single layer films and Fe/Cu multilayer films were prepared by an rf-sputtering method, and the relationships between the crystal structures and magnetic properties were investigated. Fe single layer films with saturation magnetic flux density B <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">s</inf> =2.1(T), comparable to bulk Fe, were obtained under sputtering conditions of high rf power and low Ar gas pressure. The crystal structures of multilayer films were found to depend on the thickness of the individual Fe layers, d <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">Fe</inf> , and Cu layers, d <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">Cu</inf> . Fcc single phase crystal structure was obtained for d <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">Fe</inf> =1.7nm, d <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">Cu</inf> =4.9 ∼ 9.8nm. At other combinations of d <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">Fe</inf> and d <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">Cu</inf> , the crystal. structures were mixtures of fcc and bcc. Coercive forces of the fcc single phase films were larger than those of the films with a mixture of fcc and bcc. When the films were mixed fcc and bcc, B <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">s</inf> was about 2.0(T) for thicknesses d <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">Fe</inf> =4.2 ∼ 8.4nm, and in thinner films, B <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">s</inf> decreased with decreasing d <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">Fe</inf> . B <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">s</inf> of fcc single -phase films phase was sharply decreased as film thickness decreased.
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