Abstract
The origin of high uniaxial magnetic asnisotropy in FeCoB thin films was investigated by focusing on the changes in FeCo crystal distortion and alignment. The films were prepared by facing targets sputtering using F <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">88.8</sub> Co <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">27.2</sub> B <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</sub> alloy targets and examined with X-ray diffraction (XRD) analysis. Preparation of a Ru underlayer showed reduction of coercivity H <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">c</sub> from 130 to 14 Oe and developed remarkably high-anisotropy field H <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">k</sub> , of 500 Oe. FeCo(110) of the FeCoB film with a Ru underlayer revealed an oblique crystal growth and a preferred orientation in the film plane that possessed (110) [110] along the easy axis. FeCo(110) lattice spacing has 0.5% expansion along the easy axis, which induces that the magnetoelastic energy -E <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">elastic</sub> of 3.8 times 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</sup> erg/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sup> exists along the easy axis due to an inverse magnetostriction effect. The estimated H <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">k</sub> from the E <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">elastic</sub> was 470 Oe, which corresponded well with the measured H <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">k</sub> of 500 Oe. This indicates that the strain in FeCo lattice is the origin of the remarkably high magnetic anisotropy.
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