Abstract
Abstract Based on the experimental studies of the gas cryosorption process a series of cryosorption pumping devices is developed. They are cryosorption pumps cooled by solid nitrogen and liquid helium; a pump for the evacuation of gaseous mixtures enriched by helium; a cryosorption trap and cryosorption elements for in-built pumping systems. Schematic diagrams, construction description, experimental and designed characteristics are presented.
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