Abstract
AbstractA standard commercially available cryopump system has been installed on a scanning electron microscope (SEM) using specially optimized vacuum vibration isolation bellows. This installation was successful in reducing the cryopump‐induced vibration to a level that did not degrade the standard performance or resolution of the SEM in the pump‐on mode and, in the pump‐off (or coasting) mode, eliminated all measurable instrument‐induced vibration (i.e., from the vacuum system). This article outlines the manner in which this performance has been accomplished and presents the results of an experiment demonstrating the reduction of specimen contamination provided by this type of vacuum system.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
