Cross‐sensitivity reduction of QCM humidity sensor using graphene oxide membrane as filter layer

Abstract

A new approach to greatly reduce the cross-sensitivity of a quartz crystal microbalance (QCM) humidity sensor is proposed. A graphene oxide (GO) membrane, which acts as a filter layer, is added to the sensor structure. Since the GO membrane enables selective permeation of water molecules, the introduction of the GO filter membrane into the sensor structure greatly reduces the cross-sensitivity of the humidity sensor to other gases.