Abstract
A multi-layered AlTiN–TiSiN thin film with a bi-layer period of ∼6nm is characterized by cross-sectional synchrotron X-ray nano-diffraction and -reflectivity using an X-ray beam size of 250×350nm2. The complementary approach allows for simultaneous determining gradients of residual strains and bi-layer thickness along the film depth and demonstrates a correlation between them. The observed dependency allows for a residual strain gradient design in multilayered thin films.
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