Abstract
A cross-section sample preparation technique is described for transmission electron microscopy studies of metallic materials. The technique uses jet electro-polishing for the final perforation. Examples are provided of using this technique for copper-support/copper-films/copper-support multilayer structures, grown by electro-deposition. The samples prepared by our current technique are compared with the ones made by ion-milling. The technique is also applicable to materials which are susceptible to ion beam and thermal damages.
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