Abstract
Low dielectric materials show great application potential in future microelectronic industry. In this study, benzocyclobutene-functionalized polycarbosilane derived block copolymer, poly(carbosilane-b-lactide), was synthesized via sequential anionic polymerization of silacyclobutene and ring-opening polymerization of lactide. The block copolymer revealed microphase-separation behavior to form a well-defined morphology. Simultaneously, the sacrifice of polylactide blocks by thermal decomposition and thermally-induced reaction of benzocyclobutene produces cross-linked nanoporous polycarbosilane (PBCS). The dielectric constant of this nanoporous material reaches to around 2.1.
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