Abstract
This paper presents the results of experiments designed to carefully assess the merits of the metastable time-of-flight method of measuring velocity distributions in free molecule flows. The technique is particularly well suited to gas surface interaction work where high resolution, compactness, and cleanliness of the apparatus are appealing. Our measurements are of the absolute sensitivity of the technique when applied to He, Ne, Ar, Kr, Xe, N2, H2, CO, CO2, and O2 at various electron impact energies when a tungsten Auger detector is used. Analysis of one component of a gas mixture by selecting an appropriate electron impact energy is also demonstrated. Second order effects such as those due to finite lifetime in the case of N2 and recoil from the electron impact in the case of light gases have been observed and a solution to these problems is indicated.
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