Abstract

The strain rate sensitivity to creep of single crystal Cu(110), metal tantalum, and 128°GY-X LiNbO 3 piezoelectric single crystal were measured at room temperature by MTS Nanoindenter XP. Among the three kinds of materials studied, Cu showed the highest degree of resistance to creep-induced deformation, which is followed by Ta, while the LiNbO 3 single crystal deformed more readily than the others. The values of the steady-state strain rate sensitivities determined by the indentation methods are in the range of 0.002–0.006, 0.02–0.06 and 0.02–0.03 for Cu, Ta, and LiNbO 3, respectively. The mechanisms for the indentation-induced creeping behavior and the factors that influenced the creeping are discussed.

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