Abstract
Piezoelectric linear actuators are used in a wide variety of nanopositioning platforms. The nanopositioner platforms have undesired characteristics such as hysteresis, creep and dominant low resonant frequencies. These characteristics limit the open loop performance. Hence, the closed loop is necessary to obtain a superior performance and to achieve robust repeatable nanopositioning. This paper describes the development to control a single axis of a PI-734 nanopositioning platform. The linearised model is identified using frequency response in the literature. The closed loop controller consists of three parts: feed-forward compensator, resonant mode damper and integrator. The controller structure is sample based on PID classical control using linearised model of the system. The obtained simulation results affirmed the potential of the proposed control algorithm where the creep is eliminated and the resonant mode is damped. The position tracking error is reduced to sub-nanometers.
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