Abstract

Article is dedicated to development of the scientific and technological principles allowing by means of innovative beam and plasma technologies to receive a new class of heterogeneous nanocomposite coatings having the increased cyclic crack resistance and hardness on the conductive and dielectric complex-shaped products. On the basis of the received results the source of metal atoms and beams of high-energy molecules with a rectangular target was developed and new installation for coating deposition is made.

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