Abstract
A lamellar multilayer grating in a conical diffraction mounting was proposed as a beam splitter for X-ray free-electron lasers. Theoretical calculations demonstrated that the distribution of diffraction efficiency can be adjusted by optimizing the groove depth or d-spacing. A Cr/C multilayer lamellar grating with a line density of approximately 2500 L/mm was fabricated. The performance of the element was measured in the Optics Beamline PM-1 (BESSY-II) at an energy of 1500 eV. A five-order diffraction pattern was recognized, and the diffraction efficiencies of the -/+first-order were approximately 12.6 and 4.4%, respectively. The asymmetric distribution of diffraction efficiency can be caused by the different sidewall angles of the grating groove.
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