Abstract
We successfully damaged BaF2 samples by a 46.9nm capillary discharge laser of 100μJ focused by a toroidal mirror at a grazing incidence. Ablation craters with clear boundaries were detected by optical microscope and atomic force microscope (AFM). Laser-induced nanostructures with a period of ∼1μm were observed in the ablation area under single pulse irradiation and multiple pulses irradiation. The surface behavior was compared and analyzed with that induced by the laser of 50μJ. The nanostructures were supposed to be attributed to the thermoelastic effect and the period of the structures was effected by the energy of the laser.
Highlights
Laser ablation of solids offers important advantages over the classical tools, including choice of wavelength, pulse duration and other laser parameters to match the target material properties
Capillary discharge EUV laser[6,7,8] is a proper radiation source because it is an effective compact device lasing the beam at a short wavelength with a nanosecond level pulse duration
085116-5 Cui et al In Ref. 13, we reported the nanostructures on BaF2 samples induced by 46.9nm laser of 50μJ
Summary
Laser ablation of solids offers important advantages over the classical tools, including choice of wavelength, pulse duration and other laser parameters to match the target material properties. Longer duration and shorter wavelength make the ablation process more complex, including thermal and non-thermal effect.[2,3,4,5] the complexity always offers new possibilities for micro- and nano-scale processing. Capillary discharge EUV laser[6,7,8] is a proper radiation source because it is an effective compact device lasing the beam at a short wavelength with a nanosecond level pulse duration. Characteristics of 46.9nm laser were studied based on the interaction results and LIPSS (laser-induced periodic surface structure) was detected in the ablation area with a period of several micrometers. The laser-induced craters and nanostructures will be compared and analyzed with the results before
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