Abstract
A multilayer coplanar waveguide low-pass filter on an Si substrate fabricated by using MMIC technology is presented, and the performance is investigated experimentally and with electromagnetic simulations. The filter is a Chebyshev type consisting of three low-impedance sections and two high-impedance sections. The low-impedance sections have a characteristic impedance of 3 Ω. The high-impedance lines use a narrow center conductor mounted on top of the polyimide layers in order to achieve as high an impedance as possible (100 Ω). © 1998 John Wiley & Sons, Inc. Microwave Opt Technol Lett 17: 125–128, 1998.
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