Abstract
With the continuous development of science and technology, industrial production has higher and higher requirements for precision. Many high-precision measurement technologies emerge as the times require, and nanoscale grating ruler displacement measurement technology is one of them. As a kind of precision sensor, nanoscale grating ruler has important application in displacement measurement system. CPLD has the advantages of high integration and fast programming speed, which is often used to control the displacement measurement system of nanoscale grating ruler. The purpose of this paper is to deeply explore the measurement effect and related application principle of nanoscale grating ruler displacement measurement system based on CPLD technology. A set of nanoscale grating ruler displacement measurement system is designed based on CPLD technology. The output signal of grating ruler is programmed by CPLD. The x-axis displacement of the experimental platform controlled by stepping motor is measured, and the measured data are recorded by carrying out analysis and research. The results show that compared with the traditional phase difference measurement system, the measurement accuracy of the system based on CPLD is improved by 24.7%, the robustness of the measurement system is improved by 18.6%, and the measurement speed is increased by 27.3%. Therefore, this kind of nanoscale measurement precision grating ruler displacement measurement control system based on CPLD has three characteristics: high measurement accuracy, strong anti-interference ability, and high measurement motion efficiency, which can effectively meet the requirements of grating ruler displacement measurement system for high-precision manufacturing technology.
Highlights
Manufacturing is already a major pillar industry of a country, and it is the most fundamental technological foundation on which a country depends for prosperity
Using CPLDbased displacement measurement system of nanoscale grating, the principle verification experiment was carried out on the displacement measurement system. e comparison results of the measurement data show that the displacement measurement system of the nanoscale grating and the displacement measurement system of the commercial laser interferometer can describe the movement of the moving stage
In order to check the measurement effect of the CPLD-based nanoscale displacement measurement system, a high-precision displacement measurement system based on CPLD is designed in this paper. e CPLD design produces a stable excitation pulse L1, which is used for displacement measurement directly with the induction pulse L2 in the CPLD
Summary
Manufacturing is already a major pillar industry of a country, and it is the most fundamental technological foundation on which a country depends for prosperity. At present, manufacturing engineering science and mechanical manufacturing engineering technology are rapidly developing towards the two directions of ultraprecision and miniaturization. Ultraprecision micromachining has developed into one of the important technical contents of advanced machinery manufacturing [1]. The processing of superfine materials has gradually entered a new field of nanotechnology. Grating measurement displacement technology with higher nanometer order and high resolution is already an indispensable important part in the processing of modern superfine materials, and it is urgently needed. Compared with other linear and displacement measuring sensors, the grating ruler has a high technical comprehensive application advantage in improving the measurement digital display accuracy, resolution, reliability, technical requirements for the application environment, and prices. Compared with other linear and displacement measuring sensors, the grating ruler has a high technical comprehensive application advantage in improving the measurement digital display accuracy, resolution, reliability, technical requirements for the application environment, and prices. erefore, the use of grating rulers has a very wide range of applications in Journal of Chemistry measuring digital displays, CNC machine tools, and measuring instruments [3]
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