Abstract
AbstractThe progress of CVD diamond growth technologies has allowed for acousto‐electronic applications based on diamond. Nowadays, thin (∼1 μm) and smooth nanocrystalline diamond films are used in new acousto electronic sensor applications such as flexural plate wave (FPW) sensors, microcantilever sensors and composite thin film bulk acoustic wave resonator (FBAR) sensors. The cover pictures illustrate this development. The upper picture shows an SAW filter made on a thick (∼100 μm) freestanding diamond layer coated with a piezoelectric AlN thin film. The lower picture shows an array of diamond/AlN micro‐cantilevers that can, for example, be used as pressure and temperature sensors. For more details on these devices see the Feature Article by Vincent Mortet et al. (pp. 1009–1020). The first author started to work on CVD diamond for electronic applications in 2001 and has been part of the wide band gap materials group in the Institute for Materials Research (IMO) of the Hasselt University and the Division IMOMEC, IMEC vzw in Belgium since 2004. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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